Pressure sensor for measuring pressure in an internal combustion

Details Pressure sensor for measuring pressure in an internal combustion Pressure sensor for measuring pressure in an internal combustion

1994-12-16

1997-02-25

Raevis, Robert

Measuring and testing

Vehicle drive train

Rear end

G01M 1500

Patent

active

056061170

ABSTRACT:
The pressure sensor for a combustion chamber includes a housing; a membrane closing the housing on its combustion chamber side; a monocrystalline silicon chip inside the housing and including a sensor circuit device provided with a bridge circuit device including a piezoresistor producing an electrical signal in response to applied pressure and a plunger positioned between the membrane and the silicon chip to transmit a pressure in the combustion chamber to the piezoresistor. The bridge circuit device is connected to an amplifier circuit located on the silicon chip. The amplifier circuit includes amplifier resistors having resistance values determinative of the offset of the signal and sensor sensitivity. A network circuit for offset and sensitivity adjustments is provided on the silicon chip and includes four adjusting circuits for offset, sensor sensitivity, temperature compensation of offset and for temperature compensation of sensor sensitivity. Each adjusting circuit includes parallel-connected adjusting circuit branches each including an adjusting resistor and a semiconductor element in series. The adjusting circuit branches of respective adjusting circuits are connected in parallel with respective amplifier resistors. A logic circuit also provided on the silicon chip is used to make predetermined semiconductor elements electrically conductive so that predetermined adjusting circuit branches can be made conductive with a resistance determined by the adjusting resistors in the predetermined adjusting circuit branches to make the respective adjustments.

REFERENCES:
patent: 3204463 (1965-09-01), Taber
patent: 3648524 (1972-03-01), Dahle
patent: 4333349 (1982-06-01), Mallon et al.
patent: 4576052 (1986-03-01), Sugiyama
patent: 4993266 (1991-02-01), Omura et al.
patent: 5365768 (1994-11-01), Suzuki et al.

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