Pressure sensor for measuring pressure in a medium

Details Pressure sensor for measuring pressure in a medium Pressure sensor for measuring pressure in a medium

2011-08-09

2011-08-09

Allen, Andre J (Department: 2855)

Measuring and testing

Fluid pressure gauge

With protective separator

C073S754000

Reexamination Certificate

active

07992441

ABSTRACT:
A pressure sensor module is disclosed. The pressure sensor module comprises a sensing element (1) mounted on a front side (3) of a support member (5). The support member (5) comprises a hole (7) through the support member (5) from the front side (3) to a back side (9). The sensing element (1) covers the hole (7) at the front side (3). A back side barrier (6) provided at the back side (9) of the support member (5) surrounds a surface of the back side (9) of the support member (5) and forms an enclosed area (8), wherein the enclosed area (8) and the hole (7) form a pressure channel (10). A back side protective member (2) fills the hole (7) and at least partially the enclosed area (8). The support member (5), back side barrier (6) and back side protective member (2) form a module that can be placed during production of the pressure sensor in a housing of the pressure sensor.

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patent: 2004/0040382 (2004-03-01), Peterson et al.
patent: WO02/079742 (2002-10-01), None

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