Pressure sensor device

Details Pressure sensor device Pressure sensor device

2004-11-26

2008-07-01

Allen, Andre J (Department: 2855)

Measuring and testing

Fluid pressure gauge

With protective separator

Reexamination Certificate

active

07392706

ABSTRACT:
A sensor substrate1having on its lower surface a surface acoustic wave element2for detecting pressure is mounted on a supporting substrate6through a sealing member4surrounding a sensor section2. A sealing space S is formed by the sensor substrate1, the supporting substrate6, and the sealing member4, and the surface acoustic wave element2for detecting pressure is sealed hermetically in the sealing space S. Reliability can be enhanced by protecting the surface acoustic wave element2from the external environment.

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patent: 2003-501733 (2003-01-01), None

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