Pressure sensor device

Details Pressure sensor device Pressure sensor device

2011-03-08

2011-03-08

Allen, Andre J (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

C073S756000, C438S050000, C257S419000

Reexamination Certificate

active

07900520

ABSTRACT:
A semiconductor pressure sensor for a pressure sensor device has a pressure detection element which includes a membrane made of semiconductor material, particularly silicon. The sensor includes a support having a three-dimensional body passed through by a detection passage. The detection element is made integral with a first end face of the three-dimensional body, substantially at a respective end of the detection passage. The support is configured to serve the function of a mechanical and/or hydraulic adaptor or interface, with the aim of mounting the sensor into a pressure sensor device, particularly to allow mounting the pressure sensor into a pressure sensor device configured for mounting a sensor of the type referred to as monolithic or ceramic.

REFERENCES:
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patent: 2006/0243054 (2006-11-01), Saito et al.
patent: 2007/0193359 (2007-08-01), Asada et al.
patent: 2008/0178681 (2008-07-01), Asada et al.
patent: 2009/0072333 (2009-03-01), Haag et al.
patent: 2009/0314096 (2009-12-01), Colombo

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