Pressure sensor comprising a silicon body

Details Pressure sensor comprising a silicon body Pressure sensor comprising a silicon body

1989-09-20

1991-06-18

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

73721, 338 4, G01L 906

Patent

active

050240978

ABSTRACT:
A pressure sensor comprising a silicon body (1) which is arranged on a substrate (2). The silicon body (1) comprises a cavity (4) in the form of a blind hole, or enclosed chamber which thus forms a diaphragm (5). On the outer surface thereof there is arranged a Wheatstone bridge consisting of piezoresistive resistance elements (6, 7, 8, 9). The voltage/pressure characteristic of this pressure sensor exhibits a non-linearity of more than 1% in the case of pressure loads in excess of 250 bar. This non-linearity must be reduced. Therefore, a further cavity (10) is provided in the silicon body (1) on both sides of the resistance elements (8, 9) arranged at the edge of the diaphragm (5).

REFERENCES:
patent: 4080830 (1977-04-01), Eckstein et al.
patent: 4444054 (1984-04-01), Schaff, Jr.
patent: 4528855 (1985-07-01), Singh

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