Pressure sensor assembly

Details Pressure sensor assembly Pressure sensor assembly

1987-11-27

1989-03-07

Buczinski, Stephen C.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73718, G01L 912

Patent

active

H00006068

ABSTRACT:
A pressure sensor assembly (10, 10') is disclosed in which a pressure sensing element (11, 11', 11") is protected from external contaminants in an externally-applied pressure (P) to be sensed. This is accomplished by filling an external cavity (36) of a tubular portion (32) of a cover member (30) which fits over the pressure sensing element that has previously been mounted on a metallized substrate (14). The external cavity (36) is totally filled with an incompressibel liquid (35), such as silicon oil, and a thin diaphragm (40), preferably comprising a polyimide film, seals this external cavity and provides a compliant barrier between the externally-applied pressure (P) and the imcompressible fluid (35) and pressure sensing element (11). Chemical inertness of the diaphragm (40) and incompressible fluid (35) prevents contaminants in the sensed pressure (P) from attacking the pressure sensing element (11, 11', 11"), while transmitting changes in the sensed pressure (P) substantially directly to the pressure sensing element.

REFERENCES:
patent: 3496775 (1970-02-01), Sargent
patent: 4120206 (1978-10-01), Rud
patent: 4380041 (1983-04-01), Ho
patent: 4384899 (1983-05-01), Myers
patent: 4414851 (1983-11-01), Maglic
patent: 4425799 (1984-01-01), Park
patent: 4617606 (1986-10-01), Shak et al.

Affiliated with

Also associated with

Rating

Pressure sensor assembly does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Pressure sensor assembly, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Pressure sensor assembly will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1658951