Electrical resistors – Strain gauge type – Fluid- or gas pressure-actuated
Patent
1980-09-11
1981-10-13
Albritton, C. L.
Electrical resistors
Strain gauge type
Fluid- or gas pressure-actuated
73721, 73727, G01L 122
Patent
active
042951178
ABSTRACT:
A pressure sensor element comprising a silicon chip having a diaphragm formed therein with piezoresistive strain responsive resistors is mounted in a housing of molded polyester material having a much different temperature coefficient of expansion than the chip. The chip is protected from thermally induced and other stresses by a mounting arrangement comprising a glass base secured to the housing by a soft adhesive which largely prevents stress being transmitted from the housing to the base, wherein the base has a short pedestal on which a glass die is mounted which, in turn, supports the silicon chip. The short pedestal adds localized rigidity to the base so that any stresses in the base are taken up outside the region of the pedestal. One face of the glass die is bonded to the base by a relatively soft epoxy to further inhibit stress transmission and the silicon chip is securedly bonded to the opposite face of the die. Contacts on the silicon chip are wire bonded to conductors which are insert molded in the housing.
REFERENCES:
patent: 3697917 (1972-10-01), Orth et al.
patent: 4019388 (1977-04-01), Hall et al.
patent: 4040297 (1977-08-01), Karsmakers et al.
patent: 4127840 (1978-11-01), House
Hart, Jr. John M.
Lake Donald E.
Albritton C. L.
General Motors Corporation
Hill Warren D.
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