Pressure sensor apparatus and pressure sensor built-in fluid...

Details Pressure sensor apparatus and pressure sensor built-in fluid... Pressure sensor apparatus and pressure sensor built-in fluid...

2007-01-24

2010-10-19

Allen, Andre J (Department: 2855)

Measuring and testing

Fluid pressure gauge

Combined

C137S56100R

Reexamination Certificate

active

07814797

ABSTRACT:
A pressure sensor apparatus which can provide an integrated fluid control apparatus in which a pressure sensor is easily replaced independently, as well as achieving a more compact structure, and a pressure sensor built-in fluid control equipment. A pressure sensor apparatus (21) includes a first passage block (22) in which a predetermined passage (22a) is formed, a second passage block (23) in which a predetermined passage (23a) is formed and which opposes to the first passage block (22) at a predetermined interval, and a pressure sensor (24) which is provided in an opposing surface of any one of the first and second passage blocks (23) and detects a fluid pressure in an inner passage (23b), and is integrated in a pressure regulator (16).

REFERENCES:
patent: 2007/0295414 (2007-12-01), Shinoharo et al.
patent: 07-040175 (1995-09-01), None
patent: 10-026300 (1998-01-01), None
patent: 10-132692 (1998-05-01), None
patent: 11-118054 (1999-04-01), None
patent: 2001-235099 (2001-08-01), None
patent: 2001-254900 (2001-09-01), None
patent: 2005-149075 (2005-06-01), None
patent: 2006-083959 (2006-03-01), None
International Search Report mailed May 1, 2007, issued on PCT/JP2007/051039.

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