Measuring and testing – Fluid pressure gauge – Diaphragm
Reexamination Certificate
2006-08-01
2006-08-01
Lefkowitz, Edward (Department: 2855)
Measuring and testing
Fluid pressure gauge
Diaphragm
C073S756000, C310S31300R
Reexamination Certificate
active
07082835
ABSTRACT:
A pressure sensor apparatus is disclosed herein, which generally includes a sensor element, a flexible sensor diaphragm in intimate contact with the sensor element at all pressure levels and temperatures, and a package base and a package cover for hermetically sealing the sensor element and the flexible sensor diaphragm within a hermetically sealed sensor package to provide pressure sensor data thereof. The sensor element can be implemented as a quartz sense element to produce a SAW pressures sensor. The pressure sensor apparatus can be alternatively based on other sensing technologies, such as silicon piezoresistive, ceramic capacitive and others.
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PCT Notification of the International Search Report and the Written Opinion of the International Searching Authority or the Declaration, Date of Mailing Oct. 11, 2004.
Cook James D.
Gall Kenneth E.
Malik Kundan L.
Marsh Brian J.
Allen Andre
Honeywell International , Inc.
Lefkowitz Edward
Ortis Luis M.
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