Pressure sensor and method of manufacturing same

Details Pressure sensor and method of manufacturing same Pressure sensor and method of manufacturing same

1990-08-21

1991-09-17

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

29 2542, 73718, H01G 700, G01L 912

Patent

active

050500341

ABSTRACT:
The substrate (12) and/or the diaphragm (11) of the pressure sensor (10) are made of ceramic, glass, or a single-crystal material. The side of the diaphragm (11) facing the substrate (12) is covered with a layer of silicon carbide, niobium, or tantalum which, in turn, is covered with a protective layer (21) and serves as one capacitor electrode (14). The side of the substrate (12) facing the diaphragm (11) is covered with at least one additional layer of any one of said materials which, in turn, is covered with an additional protective layer (22) and serves as the second capacitor electrode (15). Substrate (12) and diaphragm (11) are soldered together by a formed part of active solder (20) which also serves as a spacer.
This pressure sensor can be manufactured in a single soldering step. The maximum load capacity of the diaphragm is determined not by the strength of the joint, but only by the strength of the diaphragm material. The pressure sensor can be used at higher temperatures than pressure sensors with glass-frit joints.

REFERENCES:
patent: 4064550 (1977-12-01), Dias et al.
patent: 4129242 (1978-12-01), Dias et al.
patent: 4198670 (1980-04-01), Mann
patent: 4901904 (1990-02-01), Tsuno
patent: 4935841 (1990-06-01), Jonasson et al.
patent: 5001595 (1991-03-01), Dittrich et al.

Affiliated with

Also associated with

Rating

Pressure sensor and method of manufacturing same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Pressure sensor and method of manufacturing same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Pressure sensor and method of manufacturing same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1921548