Pressure sensor and method of making the same having...

Details Pressure sensor and method of making the same having... Pressure sensor and method of making the same having...

2006-02-28

2006-02-28

Oen, William (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

Reexamination Certificate

active

07004034

ABSTRACT:
A pressure sensor may include a first membrane that flexes in response to pressure, a reference cavity covered by the first membrane where the reference cavity contains a vacuum and a second membrane, adjacent to the first membrane, the first and second membranes forming a capacitor having a capacitance that varies in accordance with the flexing of the first membrane and the pressure.

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patent: 5259247 (1993-11-01), Bantien
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patent: 5381299 (1995-01-01), Provenzano et al.
patent: 5578843 (1996-11-01), Garabedian et al.
patent: 5833603 (1998-11-01), Kovacs et al.
patent: 6324914 (2001-12-01), Xue et al.
patent: 6388299 (2002-05-01), Kang et al.
patent: 2001/0009112 (2001-07-01), Delaye

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