Pressure sensor and method of fabrication thereof

Measuring and testing – Fluid pressure gauge – With pressure and/or temperature compensation

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296211, 73721, 73756, 338 4, G01L 708, G01L 906, G01L 1904

Patent

active

048502278

ABSTRACT:
A pressure sensor includes a three part package including a housing member defining two spaced-apart chambers, a bottom member providing the bottom wall of one of the chambers, and a top cover member hermetically sealing the two chambers from one another and including a port for admission of gases into one of the chambers. A pressure sensing element is disposed in the chamber having the port and mounted on the bottom member, and a signal processing element is mounted in the other chamber. Electrical connections between the two elements are by means of leads which extend into each chamber and pass through a wall separating the chambers. A low temperature differential between the two elements is provided by extending one of the leads from the other one chamber to a position directly underlying and in intimate contact with the bottom surface of the processing element in the other chamber. Additionally, the bottom member is of a high thermal conductivity material and extends along the bottom of the housing member to beneath the other chamber.

REFERENCES:
patent: 3858150 (1974-12-01), Gurtler et al.
patent: 4033787 (1977-07-01), Marshall
patent: 4295117 (1981-10-01), Lake et al.
patent: 4372803 (1983-02-01), Gigante
patent: 4456901 (1984-06-01), Kurtz et al.
patent: 4492825 (1985-01-01), Brzezinski et al.
patent: 4532533 (1985-07-01), Jackson et al.
patent: 4618397 (1986-10-01), Shimizu et al.
patent: 4708012 (1987-11-01), Folk et al.
J. A. Oakes, "A Pressure Sensor for Automotive Application," Proceedings of the Third International Conference on Automotive Electronics, pp. 143-149, 20-23 Oct. 1981, London, England, sponsored by the Institute for Mechanical Engineers.

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