Pressure sensor and method for the manufacture thereof

Details Pressure sensor and method for the manufacture thereof Pressure sensor and method for the manufacture thereof

1989-07-18

1991-04-09

Woodiel, Donald O.

Measuring and testing

Moisture content or absorption characteristic of material

29 2541, 361283, G01L 708, G01L 912

Patent

active

050054210

ABSTRACT:
The pressure sensor comprises a base body and diaphragm which are assembled at a defined distance apart parallel to each other to form a chamber, at least one of the two assembled parts consisting of ceramic, glass, metal or a monocrystalline material. In dependence upon the external pressure acting on the pressure sensor the distance between said parts and thus the capacitance between two electrodes carried by said parts changes. The base body and the diaphragm are firmly connected together by a shaped part of metal serving at the same time as spacer. If at least one of the two parts consists of ceramic, glass, metal or a monocrystalline material, the two joined parts can be soldered together by a shaped part of active solder. If the two assembled parts consist of oxide ceramic or sapphire they can be connected together by the direct copper bonding method. In this case the shaped part consists of copper which is connected to the two parts by a eutectic melt forming at the surface.

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