Pressure sensor and method for operating a pressure sensor

Details Pressure sensor and method for operating a pressure sensor Pressure sensor and method for operating a pressure sensor

2006-05-09

2006-05-09

Oen, William (Department: 2855)

Measuring and testing

Fluid pressure gauge

With protective separator

C073S724000

Reexamination Certificate

active

07040173

ABSTRACT:
A pressure sensor having a substrate, a counter-structure applied to the substrate, a dielectric on the counter-structure, a membrane on the dielectric, wherein the membrane or the counter-structure deflectable by a pressure applied, a protective structure, wherein the protective structure is isolated from the counter-structure or the membrane, wherein the protective structure is arranged with regard to the membrane or the counter-structure such that a capacity forms between the protective structure and the membrane or the protective structure and the counter-structure, and a provider for providing a potential at the protective structure differing from a potential at the counter-structure or the membrane.

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