Pressure sensor and method for manufacturing pressure sensor

Measuring and testing – Fluid pressure gauge – Electrical

Reexamination Certificate

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Reexamination Certificate

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07131337

ABSTRACT:
An inexpensive and simple pressure sensor having good static pressure characteristics is provided. In a pressure sensor including a base having a hole to which a pressure is applied and performing electrical and mechanical insulation, and a sensor having a diaphragm connected to the hole and a strain gauge for converting a strain occurring in the diaphragm to an electric signal, the sensor being mounted to the base, the base is formed with such a thickness that the strain at the time of applying a static pressure does not change.

REFERENCES:
patent: 5186055 (1993-02-01), Kovacich et al.
patent: 6782755 (2004-08-01), Tai et al.
patent: 6973836 (2005-12-01), Katsumata et al.
patent: 5-50335 (1993-07-01), None
patent: 2656566 (1997-05-01), None

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