Pressure sensor and method for manufacturing pressure sensor

Details Pressure sensor and method for manufacturing pressure sensor Pressure sensor and method for manufacturing pressure sensor

2005-06-14

2005-06-14

Oen, William (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S724000, C361S283100

Reexamination Certificate

active

06904808

ABSTRACT:
A cover plate (130) which is a plate member made of sapphire is joined to a pressure sensor chip (110), to which a buffer member (120) is fixed, by using a coating solution prepared by adding titanium dioxide to an aqueous solution of boehmite (AlO(OH)) which is a hydroxymineral of aluminum.

REFERENCES:
patent: 5349492 (1994-09-01), Kimura et al.
patent: 5801313 (1998-09-01), Horibata et al.
patent: 6167761 (2001-01-01), Hanzawa et al.
patent: 6704186 (2004-03-01), Ishikura

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