Pressure sensor and method for manufacturing pressure sensor

Details Pressure sensor and method for manufacturing pressure sensor Pressure sensor and method for manufacturing pressure sensor

2008-07-15

2008-07-15

Allen, Andre J (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

C073S756000

Reexamination Certificate

active

07398694

ABSTRACT:
The present invention aims at providing a pressure sensor having excellent reliability in sealing a pressure reference chamber and a method for manufacturing the pressure sensor. A movable electrode is formed on an opposing surface side of a diaphragm formed on a pressure-receiving substrate, and an opposing electrode is formed on a region opposing the movable electrode on an opposing substrate. From the movable electrode, a conductive film, and a terminal wire on an inner surface of a through-hole are arranged as conductive wires (lead wires). In addition, from the opposing electrode, a lead wire, a conductive film opposing the lead wire and constructing a contact point, a conductive film and a terminal wire of a castellation are arranged as conductive wires. The pressure-receiving substrate and the opposing substrate are anodically bonded together via the conductive films and, and a specific region including the opposing surface side of the diaphragm is sealed.

REFERENCES:
patent: 4766666 (1988-08-01), Sugiyama et al.
patent: 4771638 (1988-09-01), Sugiyama et al.
patent: 4833920 (1989-05-01), Knecht et al.
patent: 7-174652 (1995-07-01), None
patent: 2001-33328 (2001-02-01), None
patent: 2004-214058 (2004-07-01), None

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