Pressure sensor and method for manufacturing it

Details Pressure sensor and method for manufacturing it Pressure sensor and method for manufacturing it

1990-02-23

1991-01-15

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

29595, 296211, 338 4, G01L 708, G01L 906

Patent

active

049844687

ABSTRACT:
A pressure sensor having high measuring accuracy comprises a ceramic base of hat-like shape having a stable clamping portion, a diaphragm support portion spaced from said clamping portion and a flexible transition portion connecting said clamping portion with said diaphragm support portion; a ceramic diaphragm deformable in dependence on pressure applied thereto, formed unitary in said diaphragm support portion at a top surface thereof; and transducer means applied to a main surface of said diaphragm for converting any deformation of said diaphragm into electric signals representing said pressure applied to said diaphragm. In a manufacturing method for such a pressure sensor the diaphragm and the base comprising the clamping portion are formed in one method step into a homogenous sensor body prior to burning.

REFERENCES:
patent: 4127840 (1978-11-01), House
patent: 4389895 (1983-06-01), Rud
patent: 4434451 (1984-02-01), Delatorre

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