Pressure sensor, and its manufacturing method

Details Pressure sensor, and its manufacturing method Pressure sensor, and its manufacturing method

2005-07-12

2005-07-12

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S700000, C073S715000, C073S753000

Reexamination Certificate

active

06915698

ABSTRACT:
A small-sized pressure sensor having smaller numbers of parts and assembling steps, a simple structure, a high assembly precision, and little dispersion in the operation characteristics, and a method for manufacturing the pressure sensor. The pressure sensor comprises: a base member; a stationary electrode molded so integrally as is exposed from the bottom face of a recess formed in the upper face of the base member; moving electrode receiving portions and molded so integrally in the bottom face of the recess of the base members as are arranged in the periphery of the stationary electrode and as are higher by a predetermined inter-electrode gap than the upper face of the stationary electrode; a moving electrode opposed to the upper face of the stationary electrode through a predetermined inter-electrode gap; and a diaphragm fixed of the open edge portion of the recess of the base member and adhered integrally at the central portion of its lower face to the upper face of the moving electrode.

REFERENCES:
patent: 7-286925 (1995-10-01), None
Patent Abstracts of Japan, Publication No. 07-286925 dated Oct. 31, 1995 (2 pgs.).

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