Pressure sensor and chip therefor

Details Pressure sensor and chip therefor Pressure sensor and chip therefor

1994-10-11

1996-08-13

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

Diaphragm

73721, 73727, 73754, G01L 1302, G01L 1500, G01L 906

Patent

active

055445292

ABSTRACT:
A pressure sensor is capable of detecting a certain pressure and an atmospheric pressure individually and independently in real time, with miniaturization and light weight. This is attained by providing a pressure sensor comprising a first pressure sensor; and an atmospheric pressure sensor. Each sensor includes a pressure-sensitive element and a circuit for amplifying an output signal from the pressure-sensitive element. The amplifying circuit for the first pressure sensor, and the pressure-sensitive element and the amplifying circuit for the atmospheric pressure sensor are provided on the same chip. The amplifying circuit compensates for nonuniformity in characteristics of the pressure-sensitive element due to temperatures.

REFERENCES:
patent: 4320664 (1982-03-01), Rehn et al.
patent: 4322980 (1982-04-01), Suzuki et al.
patent: 4528855 (1985-07-01), Singh
patent: 4576052 (1986-03-01), Sugiyama
patent: 4765188 (1988-08-01), Krechmery et al.
patent: 4850227 (1989-07-01), Luettgen et al.

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