Pressure sensor

Details Pressure sensor Pressure sensor

1994-03-28

1996-11-05

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

Diaphragm

73723, G01L 912

Patent

active

055719708

ABSTRACT:
A pressure sensor based on electrostatic capacity method is disclosed, which comprises the main body of a pressure sensing element having one end surface as a pressured face and the other end surface as a back, for detecting the pressure of a measurement fluid acting on the pressured face, a seal member, a measure pattern on the back, and a one-chip IC. For size reduction, an input-output policy is provided near the main body of the pressure sensing element, and it effects input and output with respect to the pressure sensing element main body while preventing external disturbances and improving the accuracy of measurement.

REFERENCES:
patent: 4295376 (1981-10-01), Bell
patent: 4345299 (1982-08-01), Ho
patent: 4617607 (1986-10-01), Park et al.
patent: 5165281 (1992-11-01), Bell
patent: 5189916 (1993-03-01), Mizumoto et al.
patent: 5233875 (1993-08-01), Obermeier et al.

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