Pressure sensor

Details Pressure sensor Pressure sensor

1980-01-04

1982-02-02

Albritton, C. L.

Electrical resistors

Strain gauge type

Fluid- or gas pressure-actuated

73727, 338 42, 357 26, G01L 122

Patent

active

043142265

ABSTRACT:
A pressure sensor having a silicon diaphragm whose opposite surfaces are subjected to fluid pressures for measurement. The diaphragm includes a diffused resistor as a pressure-sensitive element on a silicon base, a protective layer composed of a silicon epitaxial layer opposite in conductive type to the resistor and formed on the diffused resistor in order to prevent the resistor from being exposed to a corresponding fluid pressure, and an electrically insulating layer formed on an outer surface of the protective layer.

REFERENCES:
patent: 3885999 (1975-05-01), Fusaroli et al.
patent: 3971059 (1976-07-01), Dunkley et al.
patent: 4035823 (1977-07-01), Marshall
patent: 4040297 (1977-08-01), Karsmakers
patent: 4095252 (1978-06-01), Ochi
patent: 4125820 (1978-11-01), Marshall
patent: 4129042 (1978-12-01), Rosvold
patent: 4205556 (1980-06-01), Runyan

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