Pressure sensor

Details Pressure sensor Pressure sensor

1994-03-08

1995-09-19

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

Diaphragm

73724, G01L 912

Patent

active

054507545

ABSTRACT:
A pressure sensor comprises a matrix of diaphragms of polysilicon which, via a structure of electrical conductors, are arranged at an upper side of a silicon substrate for the determination of their variable electrical capacitance dependent on the pressure stressing. These diaphragms are present in at least two different sizes. Capacitances of these diaphragms of a same size are respectively connected to form a sub-unit such that basic capacitances of these sub-units are of a respectively same size.

REFERENCES:
patent: 4443383 (1984-05-01), Binder et al.
patent: 5022270 (1991-06-01), Rud, Jr.
patent: 5321989 (1994-06-01), Zimmer et al.

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