Pressure sensor

Details Pressure sensor Pressure sensor

1980-01-04

1981-09-01

Albritton, C. L.

Electrical resistors

Resistance value responsive to a condition

Fluid- or gas pressure-actuated

73720, 338 4, H01L 1010

Patent

active

042875013

ABSTRACT:
A pair of semiconductor diaphragm blocks, each having a diaphragm on a front surface of which a diffused resistor is formed as a pressure-sensitive element, and a circumferential support integral therewith, are confined within a sealed hollow package and bonded at their circumferential supports to opposite inside surfaces of the package such that the front surfaces of the diaphragms are positioned within a vacuum space within the package. This package is provided with through holes through which fluid pressures subject to measurement are introduced so as to arrive at the back surfaces of the diaphragms.

REFERENCES:
patent: 3748623 (1973-07-01), Miller
patent: 4131088 (1978-12-01), Reddy
patent: 4168630 (1979-09-01), Shirouzu et al.

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