Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1986-09-03
1989-03-07
Orsino, Joseph A.
Measuring and testing
Fluid pressure gauge
Diaphragm
73DIG4, 73721, 338 4, 338 42, G01L 904
Patent
active
048095559
ABSTRACT:
A pressure sensor has a metal housing. The housing has a closed-off and fluid-filled pressure space. A diaphragm partitions the pressure space off from the environment and transmits pressures derived therefrom to the fluid. A pressure-sensitive chip of semiconducting material is exposed to the pressure of the fluid and has a piezoresistant and anisotropic effect. Connectors, metal rods for instance, extend pressure-tight and electrically insulated from the metal housing into the pressure space. The connectors can be connected to an electric processing circuit. The pressure-sensitive chip is connected by bonds. To provide a pressure sensor that will be cheaper to manufacture, less sensitive to malfunction, and more precise, the pressure sensor is provided with a base plate of aluminum nitride. At least some areas of its surface are metallized. The pressure-sensitive chip is soldered to the base plate within a metallized area.
REFERENCES:
patent: 3817107 (1974-06-01), Shimada et al.
patent: 4129042 (1978-12-01), Rosvold
patent: 4226125 (1980-10-01), Waugh
patent: 4303903 (1981-12-01), Matsuoka et al.
patent: 4333349 (1982-06-01), Mallon et al.
patent: 4411158 (1983-10-01), Schaff, Jr.
patent: 4656454 (1987-04-01), Rosenberger
patent: 4665754 (1987-05-01), Glenn et al.
patent: 4675643 (1987-06-01), Tanner et al.
patent: 4680569 (1987-07-01), Yamaki et al.
patent: 4726233 (1988-02-01), Eckardt et al.
KMK Sensortechnik brochure.
Fogiel Max
Orsino Joseph A.
Swarthout Brent A.
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