Pressure sensor

Details Pressure sensor Pressure sensor

1991-08-12

1993-03-02

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

73718, 361283, G01L 708, G01L 912

Patent

active

051899167

ABSTRACT:
A pressure sensor having a ceramic substrate formed from a first unsintered ceramic material, and a diaphragm capable of deformation under pressure, and formed of a second unsintered ceramic material having a factor of shrinkage upon sintering smaller than that of the first material. The diaphragm is fixed to the periphery of a surface of the ceramic substrate to form an integral assembly having a hollow space formed therebetween upon sintering due to the difference in the factor of shrinkage of the first and second materials.

REFERENCES:
patent: 5027652 (1991-07-01), Goebel et al.

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