Pressure sensor

Details Pressure sensor Pressure sensor

1994-03-28

1996-10-01

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

Diaphragm

73723, G01L 912

Patent

active

055612474

ABSTRACT:
A pressure sensor of electrostatic capacitance type is disclosed, which detects the pressure of a measurement fluid acting on a pressured surface of an elastic diaphragm from a change in the electrostatic capacitance between opposed electrodes provided on opposed surface of a ceramic base and the elastic diaphragm. The base side electrode comprises a plurality of division electrode one enclosing the next inner one. Of these division electrodes the outermost one is grounded or held at a predetermined voltage, or it is covered by overcoat glass, and thus it is imparted with a function of stabilizing the measurement value. In an electrode hole for leading an electrode to the outside, a path is formed for leading atmospheric air or like fluid providing for the reference pressure for pressure measurement into the space defined between the base and elastic diaphragm.

REFERENCES:
patent: 4295376 (1981-10-01), Bell
patent: 4345299 (1982-08-01), Ho
patent: 4617607 (1986-10-01), Park et al.
patent: 5165281 (1992-11-01), Bell
patent: 5189916 (1993-03-01), Mizumoto et al.
patent: 5233875 (1993-08-01), Obermeier et al.

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