Pressure sensor

Details Pressure sensor Pressure sensor

1980-08-27

1983-05-03

Albritton, C. L.

Electrical resistors

Resistance value responsive to a condition

Fluid- or gas pressure-actuated

338 4, H01L 1010

Patent

active

043822479

ABSTRACT:
A deformable membrane is made by applying, by thick-film technology, a glass-ceramic paste over a vaporizable or burnable filler material, containing primarily carbon black in a binder which, in turn, is located on a substrate, for example of ceramic, glass, enameled metal or the like. The substrate for example is about 1.5 cm square, the membrane glass ceramic being applied as a circular dot of about 0.5 cm diameter. After solidifying the paste forming the membrane in a protective gas atmosphere, for example at about 950.degree. C., the filler is burned out in an oxidizing atmosphere, to escape through pores in the membrane material. By selecting a membrane material which has a lower thermal coefficient of expansion than that of the substrate, after burning, the membrane will assume a convex shape leaving a hollow space (8) beneath it and the substrate. The membrane is pressure-sensitive, for example when a predetermined quantity of a predetermined gas under a predetermined pressure is sealed therein, or if access to the interior of the space is provided through the substrate, for example by a tiny duct which is connected to a flange or stub connection. Electrical output can be obtained by applying either a metallic layer cover the membrane and utilizing the capacity of the metallic layer with respect to a counter electrode, or applying strain-compression sensitive resistors on the membrane. The membrane, after the electrodes or resistors are applied, is coated with a protective glass glaze (6). The pressure transducer is particularly for determining the pressure conditions in the induction pipe of an internal combustion engine.

REFERENCES:
patent: 3455165 (1969-07-01), Huet
patent: 4040172 (1977-08-01), Kurtz
patent: 4079508 (1978-03-01), Nann
patent: 4127840 (1978-11-01), House

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