Pressure sensor

Electricity: electrical systems and devices – Electrostatic capacitors – Variable

Patent

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Details

73718, 73724, 361272, H01G 700

Patent

active

042888352

ABSTRACT:
A pressure sensor including a pressure capsule such as a dual diaphragm quartz capacitance pressure capsule and structure for supporting and sealing same within the pressure environment to be measured. The pressure capsule having two parallel quartz plates spaced by a dielectric ring forming a vacuum chamber therein. The structure providing a force balanced support for compressively loading the pressure capsule through the dielectric ring. The structure further having transfer port therein to communicate the pressure environment to both plates.

REFERENCES:
patent: 3715638 (1973-02-01), Polye
patent: 3857074 (1974-12-01), Kobale
patent: 3952234 (1976-04-01), Birchall
patent: 4064550 (1977-12-01), Dias
patent: 4073191 (1978-02-01), Saigusa
patent: 4115833 (1978-09-01), Cirkez
patent: 4128000 (1978-12-01), Grabow
patent: 4151578 (1979-04-01), Bell
patent: 4152748 (1979-05-01), Arkans
patent: 4204244 (1980-05-01), Ho

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