Metal working – Method of mechanical manufacture – Electrical device making
Patent
1989-06-21
1990-11-27
Echols, P. W.
Metal working
Method of mechanical manufacture
Electrical device making
264 59, 264 61, 338 2, 338 4, H01C 1702, H01C 1706
Patent
active
049725793
ABSTRACT:
A pressure sensor including a ceramic diaphragm which is deformable in response to a pressure applied thereto, a ceramic base associated with a periphery of the ceramic diaphragm, for supporting the ceramic diaphragm, and at least one resistor formed on the ceramic diaphragm. Resistance values of the resistor are adapted to vary depending upon a magnitude of deformation of the ceramic diaphragm, and thereby represent the pressure applied to the ceramic diaphragm. The ceramic diaphragm and the ceramic base consist of a co-fired body obtained by co-firing an unfired diaphragm member and an unfired base member.
REFERENCES:
patent: 4071838 (1978-01-01), Block
patent: 4217783 (1980-08-01), Ito et al.
patent: 4311980 (1982-01-01), Prudenziati
patent: 4806295 (1989-02-01), Trickett et al.
patent: 4818454 (1989-04-01), Urquhart et al.
Dell Acqua et al., "Characteristics and Performances of Thick Film Pressure Sensors for Automotive Applications", SAE Technical Paper Series (Feb. 1982).
Dell Acqua et al., "High Pressure Thick Film Monolithic Sensors", Sensors and Actuators (Feb. 1986).
Cattaner et al., "Low Cost Thick Film Pressure Sensor", 800023, Society of Automotive Engineers (1980).
Echols P. W.
NGK Insulators Ltd.
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