Pressure sensor

Details Pressure sensor Pressure sensor

1988-12-12

1990-11-13

Reynolds, Bruce A.

Electrical resistors

Strain gauge type

Dynamometer type

338 2, 338 4, 20419221, 296211, G01L 122

Patent

active

049704877

ABSTRACT:
A sensor is provided for detecting a physical quantity such as fluid pressure and acceleration of a mass and converting same into electrical signals. The sensor has a diaphragm made of a metal deformable by the physical quantity, a layered constructed insulating means of an insulating material which is formed on the diaphragm by means of a physical vapor desposition process, wherein the layered constructed insulating means has at least two insulating material layers, a strain gauge formed on the layered constructed insulating means opposite the diaphragm by means of a physical vapor deposition process, and a contact zone on the strain gauge to provide an electrical connection for a physical quantity sensing device to the sensor. Due to the layered construction of the insulating means, the thickness of the insulating means as a whole may be reduced below that of a single layer insulating means and maintain good insulative properties particularly at excessive strain.

REFERENCES:
patent: 4503709 (1985-03-01), Ruhle
patent: 4763097 (1988-08-01), Kant et al.

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