Pressure sensor

Details Pressure sensor Pressure sensor

1983-07-05

1985-02-19

Envall, Jr., Roy N.

Electrical resistors

Strain gauge type

Fluid- or gas pressure-actuated

338 42, 73720, 73726, G01L 122

Patent

active

045008647

ABSTRACT:
A pressure sensor converts fluid pressures into electrical signals by the deformation of a diaphragm. The pressure sensor is comprised of a strain gauge which includes resistance body of amorphous metal material which may be formed directly on the diaphragm by means of a physical vapor deposition process.

REFERENCES:
patent: 3235826 (1964-03-01), Crites
patent: 3289134 (1966-11-01), Laimins et al.
patent: 3395089 (1968-07-01), Mayer et al.
patent: 3899766 (1975-07-01), Mermelstein
patent: 4100524 (1978-07-01), Kirsch
patent: 4104605 (1978-08-01), Boudreaux et al.
patent: 4298505 (1981-11-01), Dorfeld et al.
patent: 4325048 (1982-04-01), Zaghi et al.
patent: 4382247 (1983-05-01), Stecher et al.
Borshchevskii et al., "Method of Designing Diaphragm-Type Tensoresistors Pressure Transducers", Measurement Techniques, vol. 19, No. 7, Jul. 1976, pp. 991-994.
Cattaneo, "The Industrial Applications of the Piezoresistive Effect: A Low Cost Thick Film Pressure Sensor", Conference Proceedings of 30th Electronic Components Conference, San Francisco, CA, USA (Apr. 28-30, 1980), pp. 429-435.

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