Electrical resistors – Strain gauge type – Fluid- or gas pressure-actuated
Patent
1986-03-21
1987-12-08
Goldberg, E. A.
Electrical resistors
Strain gauge type
Fluid- or gas pressure-actuated
338 42, G01L 122, H01L 1010
Patent
active
047120827
ABSTRACT:
A pressure sensor includes a metal diaphragm provided at the end of a pressure introduction portion, a glass layer bonded to a surface of the metal diaphragm opposite to the pressure introduction side thereof, and a semiconductor chip acting as a semiconductor strain gauge bonded to the surface of the glass layer.
REFERENCES:
patent: 2784593 (1957-03-01), Peucker
patent: 3341796 (1967-09-01), Eisele
patent: 4382377 (1983-05-01), Kleinschmidt et al.
patent: 4481497 (1984-11-01), Kurtz et al.
Hattori Tadashi
Ito Novuei
Mizuno Naohito
Nishida Minoru
Goldberg E. A.
Lateef M. M.
Nippon Soken Inc.
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