Pressure sensor

Details Pressure sensor Pressure sensor

2009-03-17

2010-11-02

Allen, Andre J (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S721000, C073S726000

Reexamination Certificate

active

07823456

ABSTRACT:
A pressure sensor is provided with a carrier (2), which in an inner region includes a membrane (4) on which at least one first measurement element (R1−) for detecting a pressure impingement of the membrane (4) is arranged. Additionally, at least one second measurement element (R3−) for detecting a pressure impingement of the membrane (4) is arranged on the membrane. The first measurement element (R1−) and the second measurement element (R3−) are arranged distanced differently far from the edge of the membrane. The output signals of the first and the second measurement element (R1−, R3−) are evaluated together in a manner such that the two measurement elements (R1−, R3−) detect a differential pressure acting on the membrane (4), and thereby compensate the influence of the system pressure acting on both sides of the membrane (4).

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