Pressure sensor

Details Pressure sensor Pressure sensor

2007-03-13

2008-07-29

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S715000, C257S777000, C361S283100

Reexamination Certificate

active

07404330

ABSTRACT:
A pressure sensor includes a metal housing and a semiconductor chip. The housing has a diaphragm unitary with the housing and an inlet for introducing fluid to the diaphragm. The inlet has a first end exposed to the diaphragm and a second end exposed to an outside of the housing. The housing has a thin-wall portion at the first end of the inlet and the thin-wall portion serves as the diaphragm. The chip is mounted on the diaphragm. The area and thickness of the chip are set so that separation between the chip and diaphragm can be prevented. Since the separation is prevented based on the area and thickness of the chip, there is no need that the diaphragm is made of a material having a thermal expansion coefficient similar to that of the chip.

REFERENCES:
patent: 6595065 (2003-07-01), Tanizawa et al.
patent: 6651508 (2003-11-01), Baba et al.
patent: 7021152 (2006-04-01), Tenerz
patent: 7331236 (2008-02-01), Smith et al.
patent: 1 118 849 (2002-08-01), None
patent: A-2000-298071 (2000-10-01), None

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