Pressure sensor

Details Pressure sensor Pressure sensor

1994-06-16

1996-04-16

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

Diaphragm

73720, 73721, 73727, 73756, G01L 900, G01L 700

Patent

active

055071864

ABSTRACT:
In a pressure sensor, a force is transferred via a pressure plunger end made of relatively hard material onto a measurement element including a sensor membrane on a support. The sensor membrane is part of a micromechanical arrangement made of silicon. A metal structure made of a metal of lower hardness compared with the hardness of the material of the pressure plunger end is applied onto the sensor membrane. This metal structure can be impressed and plastically deformed with increased force by the contact surface of the pressure plunger end, in such a way that conforming contact of the contact surface is achieved, and potential angular errors are compensated for.

REFERENCES:
patent: 5249468 (1993-10-01), Benedikt et al.

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