Pressure sensor

Details Pressure sensor Pressure sensor

2006-06-13

2006-06-13

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Vibration type

C073S715000

Reexamination Certificate

active

07059192

ABSTRACT:
A pressure sensor is a micro-electro-mechanical vibrating device, with a silicon substrate (15; 15′) onto which a single-layer or multilayer vibrating assembly (121; 221; 321) is formed. It comprises an electrode (21; 21′), which makes the assembly to oscillate relative to the substrate at the resonance frequency or at another known frequency, and a detector for detecting the actual frequency and/or amplitude of said oscillation. The actual frequency and/or amplitude are affected by the conditions, in particular the pressure, of the external environment and the variations of the frequency and amplitude with respect to the values set by the electrode is used to measure pressure variations in the surrounding environment.

REFERENCES:
patent: 4841775 (1989-06-01), Ikeda et al.
patent: 5152173 (1992-10-01), Willson
patent: 5426981 (1995-06-01), Cook et al.
patent: 5528939 (1996-06-01), Martin et al.
patent: 6140689 (2000-10-01), Scheiter et al.
patent: 6497141 (2002-12-01), Turner et al.
patent: 6532822 (2003-03-01), Boyd
patent: 6901795 (2005-06-01), Naguib et al.
patent: 1 026 492 (2000-08-01), None
patent: 1 530 036 (2005-05-01), None
Article by Haueis, M., et al., entitled “Packaged Bulk Micromachined Resonat Force Sensor for High Temperature Applications”, Proceedings of SPIE, vol. 4019 (2000), pp. 379-387.

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