Measuring and testing – Fluid pressure gauge – Electrical
Reexamination Certificate
2006-05-02
2006-05-02
Oen, William (Department: 2855)
Measuring and testing
Fluid pressure gauge
Electrical
Reexamination Certificate
active
07036384
ABSTRACT:
A pressure sensor includes a semiconductor substrate having a diaphragm in which an electrical circuit including a gauge resistance is formed, an insulation film provided on a surface of the semiconductor substrate, an Al film provided on the insulation film and electrically connected to the electrical circuit through a conductor hole of the insulation film, an Au film provided on the Al film through a Ti film, a first protective film which covers the Al film and has an opening portion from which a portion of the Au film is exposed. In the pressure sensor, a second protective film made of polyimideamide or polyimide covers at least the surface of the Au film exposed from the first protective film, and a vicinity of the opening portion of the first protective film. Therefore, corrosion resistance of the Al film can be prevented while the pressure sensor has a reduced component number.
REFERENCES:
patent: 4766666 (1988-08-01), Sugiyama et al.
patent: 4771638 (1988-09-01), Sugiyama et al.
patent: 5595939 (1997-01-01), Otake et al.
patent: 5852320 (1998-12-01), Ichihashi
patent: 6058781 (2000-05-01), Kusuyama et al.
patent: 6393922 (2002-05-01), Winterer
patent: 2005/0034526 (2005-02-01), Shinyama et al.
patent: A-10-153508 (1998-06-01), None
patent: A-2001-343298 (2001-12-01), None
Tanaka Hiroaki
Tomisaka Manabu
LandOfFree
Pressure sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Pressure sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Pressure sensor will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3598714