Pressure sensor

Measuring and testing – Fluid pressure gauge – Diaphragm

Reexamination Certificate

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Details

C338S004000

Reexamination Certificate

active

07013735

ABSTRACT:
A differential pressure sensor chip (4) comprises a diaphragm for measuring a differential pressure and converts a pressure received by the diaphragm for measuring the differential pressure into an electrical signal. A static pressure sensor chip (5) comprises a diaphragm for measuring a static pressure and converts a pressure received by the diaphragm for measuring the static pressure into an electrical signal. The differential pressure sensor chip (4) and static pressure sensor chip (5) are mounted on a header (1) so that one surface of the differential pressure sensor chip (4) and one surface of the static pressure sensor chip (5) are exposed to the interior of a common pressure introducing chamber (17).

REFERENCES:
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patent: 5029479 (1991-07-01), Bryan
patent: 5672808 (1997-09-01), Klauder et al.
patent: 5804736 (1998-09-01), Klauder et al.
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patent: 09-138173 (1997-05-01), None
patent: 10-197316 (1998-07-01), None
patent: 10-197316 (1998-07-01), None
patent: 11-132881 (1999-05-01), None
patent: 11-160176 (1999-06-01), None
patent: 2000-121475 (2000-04-01), None

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