Pressure sensor

Details Pressure sensor Pressure sensor

2005-11-22

2005-11-22

Oen, William (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

Reexamination Certificate

active

06966229

ABSTRACT:
A pressure gauge is arranged to function on the outside of a measuring element. The measuring element has a central cavity and is constituted by at least to parts, which are tightly joined for creation of the cavity. The measuring element has sensor organs for determining the mechanical state of stress of the measuring element during pressure influence. The two parts of the measuring element are manufactured with planar techniques, preferably by silicon or quarts with the cavity running in the longitudinal direction. The central cavity has a considerably greater height than width. The sensor organs have form of piezo-resistive elements arranged near an outer surface of the measuring element.

REFERENCES:
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patent: 4984467 (1991-01-01), Haefner
patent: 5024098 (1991-06-01), Petitjean et al.
patent: 5107710 (1992-04-01), Huck et al.
patent: 5744727 (1998-04-01), Hanneborg et al.
patent: 5861558 (1999-01-01), Buhl et al.
patent: 6145383 (2000-11-01), Meringdal et al.
patent: 0373010 (1990-06-01), None
patent: 9732190 (1997-09-01), None

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