Pressure sensor

Measuring and testing – Fluid pressure gauge – Diaphragm

Reexamination Certificate

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Details

C073S700000, C092S091000

Reexamination Certificate

active

06843132

ABSTRACT:
A pressure sensor is realized wherein output error of sensor element can be reduced even in the case where the pressure sensor is utilized in high temperature conditions. A pressure sensor is provided with a housing20, a diaphragm24that partitions the interior and the exterior of the housing20, a sensor element54provided within the housing20, output value of the sensor element54varying in accordance with force exerted thereupon, and a force transmitting rod52provided within the housing, the force transmitting rod52moving downwardly when a pressure is exerted upon the diaphragm24, the force transmitting rod52thereby exerting force upon the sensor element54. The diaphragm24has a central region26contacting with the force transmitting rod52, and a surrounding region27surrounding the periphery of the central region26and connecting the central region26with the housing20. The surrounding region27, viewed cross-sectionally along the radius, is V-shaped or U-shaped, and cancels thermal expansion.

REFERENCES:
patent: 4711129 (1987-12-01), Stubenberg et al.
patent: 6120033 (2000-09-01), Filippi et al.
patent: 6376120 (2002-04-01), Azema
patent: 6595064 (2003-07-01), Drewes et al.
patent: A 7-19981 (1995-01-01), None
patent: A 7-306107 (1995-11-01), None

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