Pressure-sensitive transducer using piezo ceramic material

Details Pressure-sensitive transducer using piezo ceramic material Pressure-sensitive transducer using piezo ceramic material

1983-09-27

1985-01-22

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310339, 310366, 340365A, 340365C, H01L 4108

Patent

active

044954344

ABSTRACT:
A pressure-sensitive transducer arrangement comprises a matrix of transducer elements which are formed at the points of intersection of row conductors (35, 36) and column conductors (5 to 7). A flat substrate (2) is provided with column conductors (5 to 7), each of which is covered with a similarly-structured piezoceramic material as a dielectric medium (15 to 17). This piezoceramic material is separated from the row electrode (35, 36) by empty spaces (24 to 26). Due to bilateral spacing of less than 100 micrometers for the row conductors and column conductors, a sensor matrix is produced with a dense packing of pressure-sensors functioning as capacitors which are formed at the cross-points of the row and column conductors. These sensors are particularly adapted for use in the gripping device of an industrial robot and make it possible to detect and determine the position of robot workpieces.

REFERENCES:
patent: 3308253 (1967-03-01), Krakinowski
patent: 3350608 (1967-10-01), Maltner et al.
patent: 3653038 (1972-03-01), Webb et al.
patent: 3750149 (1973-07-01), Sessler et al.
patent: 3935485 (1976-01-01), Yoshida et al.
patent: 3951250 (1976-04-01), Pointon et al.
patent: 4234813 (1980-11-01), Iguchi et al.
patent: 4328441 (1982-05-01), Kroeger, Jr. et al.
patent: 4412209 (1983-10-01), Frame et al.
The Industrial Robot, Mar. 1978, pp. 9-18.
Elektronikschau, vol. 9, 1980, p. 27.

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