Pressure sensitive element

Details Pressure sensitive element Pressure sensitive element

1986-04-07

1987-07-28

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Photoelectric

250231P, 356352, G01L 708, G01L 900

Patent

active

046825002

ABSTRACT:
A pressure sensitive element having a pair of light reflecting thin films formed through a thin film producing process and composing a Fabry-Perot resonator which is arranged so as to face a light transmitting system, and a diaphragm laminated on the light reflecting thin films, wherein an optical path difference is formed in accordance with an interval of an air gap located between the pairs of light reflecting thin films, while the interval of the air gap changes by the deformation of the diaphragm.

REFERENCES:
patent: 4329058 (1982-05-01), James et al.
patent: 4408123 (1983-10-01), Sichling et al.

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