Pressure sensing apparatus

Details Pressure sensing apparatus Pressure sensing apparatus

1982-06-30

1984-10-09

Myracle, Jerry W.

Measuring and testing

Fluid pressure gauge

Diaphragm

73118, G01L 912

Patent

active

044754027

ABSTRACT:
An etched metal membrane has its rim laser-welded or electron-beam-welded to a ring made of the same kind of metal within which a central electrode is held by a metal-to-glass seal. The welding is done in vacuum to avoid the necessity of later evacuation. The pressure sensor capacitance thus formed is connected through an impedance converter to an oscillator circuit which provides an output frequency that varies with the sensed pressure. The inner surface of the central electrode is flush with the surface of the rim to which the membrane is welded to reduce variations in capacitance of the sensor, and any residual variations are compensated by a resistance balance in the evaluation circuit. The insensitivity of the system to temperature and its service life make it suitable for sensing the intake air pressure of an internal combustion engine.

REFERENCES:
patent: 2250471 (1941-07-01), Bruin
patent: 4257274 (1981-03-01), Shimada et al.

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