Pressure reduction process device, pressure reduction...

Fluid handling – Processes – Cleaning – repairing – or assembling

Reexamination Certificate

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Details

C137S240000

Reexamination Certificate

active

08051870

ABSTRACT:
The object of the present invention is to provide a low pressure processing system having no possibility of leakage at a valve provided in an exhaust passage when the valve is closed, and capable of reducing a load of maintenance work. An exhaust pipe3connected to a reaction tube1is provided therein with a gate valve4for hermetically closing the exhaust passage. A purge gas is jetted, from jetting ports circumferentially arranged respectively in a valve seat and a valving element of the gate valve, into a gap between the valve seat and the valving element. This prevents foreign objects originated from a process gas from adhering to those surfaces of the valve seat and the valving element that face the gap between the valve seat and valving element, improving sealing capability of the gate valve.

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Notification of Transmittal of Translation of the International Preliminary Report on Patentability (Form PCT/IB/338)—PCT/JP2004/009440, dated Jan. 2004.
PCT International Preliminary Report on Patentability (Form PCT/IB/373)—PCT/JP2004/009440, dated Jan. 2004.
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Korean Office Action issued on Sep. 27, 2010 for KR Application No. 10-2005-7008327 w/English translation.

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