Pressure reducer for pure gases

Fluid handling – Line condition change responsive valves – With separate connected fluid reactor surface

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Details

13750539, 137549, 137550, F16K 31126, F16K 5100

Patent

active

048362425

ABSTRACT:
A pressure reducer, especially adapted for the supply of very pure gas in the electronics industry, which comprises a final stage having an inlet, pressure-reducing means and a low-pressure outlet. A filter having a filtration threshold lower than a micron is interposed between the pressure-reducing means and the low pressure outlet.

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