Pressure monitor incorporating saw device

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Reexamination Certificate

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C310S31300R, C310S348000

Reexamination Certificate

active

07151337

ABSTRACT:
A pressure monitor has a base and a lid secured to the base to define a substantially fluid tight chamber. At least part of the lid is flexible and forms a diaphragm which deflects responsive to changes in fluid pressure surrounding the monitor. A projection provided on the diaphragm transmits movement thereof to a distortable substrate located within the chamber. A first SAW device is mounted on the distortable substrate, and at least a second and third SAW device are mounted within the chamber. The second SAW device carried on a reference substrate section has its direction of propagation inclined at an angle to the direction of propagation of at least one of the first and third SAW devices. This way movement of the diaphragm induced by a change in pressure in the zone surrounding the monitor results in distortion of the distortable substrate, which is measurable by the SAW device mounted thereon, without distorting said reference substrate section.

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W. Buff et al., “Universal Pressure and Temperature Saw Sensor For Wireless Applications,” Tech. Univ. of Ilmenau, Inst. of Solid State Elec., Ilmenau, Germany; 1997 IEEE Ultrasonics Symposium; pp. 359-362.
Y. Vlassov et al., “Precision Saw Pressure Sensors”, Inst. of Semiconductor Physics, Siberian Branch of the Russian Academy of Science; Novosibisk, Russia; 1993; pp. 665-669.

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