Pressure microsensor

Details Pressure microsensor Pressure microsensor

1991-07-19

1992-09-15

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Vibration type

7386241, G01L 1100

Patent

active

051467879

ABSTRACT:
A pressure microsensor comprises, between two plates in an insulating material: a bottom silicon plate (3) forming a base; a middle silicon plate (2) constituting a diaphragm (11) surrounded by a frame (12), a first part (15) of a stud being formed at a decentred location of the diaphragm; and a top silicon plate (1) comprising a frame (17) corresponding to that of the middle plate, a second parts (16) of said stud and a silicon blade (18) constituting a resonator connecting the top of the stud to a high area of the frame. A measuring interval (13) is provided between the diaphragm and the bottom plate, this interval comprising an access (14, 28), and the two insulating plates (4, 5) cooperate with the border of the three assembled silicon plates to form a closed cavity.

REFERENCES:
patent: 4229979 (1980-10-01), Greenwood
patent: 4614119 (1986-09-01), Zavracky et al.
patent: 4790192 (1988-12-01), Knecht et al.
patent: 4813271 (1989-03-01), Greenwood
patent: 4841775 (1989-06-01), Ikeda et al.
patent: 4881056 (1989-11-01), Mizukoshi et al.
patent: 5060526 (1991-10-01), Barth et al.

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