Pressure micro-sensor

Details Pressure micro-sensor Pressure micro-sensor

1993-02-19

1994-04-26

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Vibration type

73724, 310324, 310338, 3612834, G01L 708, G01L 1100

Patent

active

053056434

ABSTRACT:
A pressure micro-sensor is formed by a sandwich of three silicon plates in contact by their periphery, with an interposed insulating layer in order to define an internal cavity. The lower plate (2) includes a thinner region (21) forming a diaphragm, on its internal side. The intermediate plate (1) includes a peripheral region (11) forming a frame coupled to the upper and lower plates by a silicon oxide layer (24, 25), a first stud (13) mounted onto the thinner region of the lower plate, a second stud (14) mounted onto a thick region of the lower plate, and a silicon beam (15) forming a resonator and disposed between the upper surfaces of the first and second studs in front of the upper plate (3). A first electrode (32) is connected to the upper plate, a second electrode (33) is connected to the frame and a third electrode (31) is connected to the second stud.

REFERENCES:
patent: 4841775 (1989-06-01), Ikeda et al.
patent: 5146787 (1992-09-01), Thomas et al.

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