Pressure measuring system for vacuum chamber using...

Details Pressure measuring system for vacuum chamber using... Pressure measuring system for vacuum chamber using...

2007-06-12

2007-06-12

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Vibration type

C073S716000, C073S718000

Reexamination Certificate

active

11418768

ABSTRACT:
Disclosed is a pressure measuring system for a vacuum chamber, in particular, a pressure measuring system for a vacuum chamber using ultrasonic wave. In this regard, there is provided a pressure measuring system for a vacuum chamber using ultrasonic wave, comprising a vacuum chamber10formed with desired vacuum at the inside thereof; ultrasonic wave-emitting means mounted close to an outer peripheral surface of the vacuum chamber10for emitting an ultrasonic wave62to the inside of the vacuum chamber10; ultrasonic wave-receiving means for receiving a reflection wave64reflected after the striking of the ultrasonic wave62emitted from the ultrasonic wave-emitting means to the vacuum chamber; reflection wave-detecting means for detecting the reflection wave64from the ultrasonic wave-receiving means; and amplitude-analyzing means for analyzing the amplitude of the reflection wave64detected by the reflection wave-detecting means.

REFERENCES:
patent: 4574615 (1986-03-01), Bower et al.
patent: 4586382 (1986-05-01), Sinha
patent: 4656864 (1987-04-01), Kraus et al.
patent: 5501113 (1996-03-01), Harrison et al.
patent: 6279378 (2001-08-01), Sheen et al.
patent: 6393921 (2002-05-01), Grimes et al.

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